Radiation measurement system

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United States of America Patent

PATENT NO 11774867
APP PUB NO 20220146944A1
SERIAL NO

17433494

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A radiation measurement system (200) comprising an optical apparatus (205) configured to receive a radiation beam (210) and change an intensity distribution of the radiation beam to output a conditioned radiation beam (215), and a spectrometer (220) operable to receive the conditioned radiation beam and determine spectral content of the conditioned radiation beam. The radiation measurement system may form part of a lithographic apparatus.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Godfried, Herman Philip Amsterdam, NL 32 176
Op, 'T Root Wilhelmus Patrick Elisabeth Maria Nederweert, NL 15 20

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