Flexible hydrogen sensor with ultra-high sensitivity and wide range and fabrication method therefor

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United States of America Patent

PATENT NO 11774425
SERIAL NO

18033072

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Abstract

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Disclosed is a flexible hydrogen sensor with ultra-high sensitivity and a wide range and a fabrication method therefor. The sensor includes a conductive electrode layer (4), a sensing layer and a flexible substrate layer (1) in sequence from top to bottom. The sensing layer includes a MOx film (2) and Pd nanoparticles (NPs) (3), and the Pd NPs (3) are covered on the MOx film (2). A traditional metal oxide type hydrogen sensor and a quantum conductance-based hydrogen sensor are combined on a flexible polymer substrate by means of an atomic layer deposition (ALD) technology and a cluster beam deposition (CBD) technology, so as to obtain a flexible hydrogen sensor with ultra-high sensitivity, a wide range and excellent selectivity and lower working temperature.

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Patent Owner(s)

Patent OwnerAddress
NANJING UNIVERSITYNO 163 XIANLIN AVENUE QIXIA DISTRICT NANJING JIANGSU 210023

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Jian Jiangsu, CN 1588 23569
Fang, Jiabin Jiangsu, CN 1 1
Han, Min Jiangsu, CN 31 69
Li, Aidong Jiangsu, CN 5 7
Ren, Qiang Jiangsu, CN 29 172

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