Methods for extracting and recycling ammonia from MOCVD process exhaust gas by FTrPSA

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11772037
SERIAL NO

16423181

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The present invention discloses methods for extracting and recycling ammonia in MOCVD processes by FTrPSA. Through pretreatment, medium-shallow temperature PSA concentration, condensation and freezing, liquid ammonia vaporization, PSA ammonia extraction, and ammonia gas purification procedures, ammonia-containing exhaust gases from MOCVD processes are purified to meet the electronic-level ammonia gas standard required by the MOCVD processes, so as to implement recycling and reuse of the exhaust gases, where the ammonia gas yield is greater than or equal to 70-85%. The present invention solves the technical problem that atmospheric-pressure or low-pressure ammonia-containing exhaust gases in MOCVD processes cannot be returned to the MOCVD processes for use after being recycled, and fills the gap in green and circular economy development of the LED industry.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ZHEJIANG TIANCAIYUNJI TECHNOLOGY CO LTDROOM501 FIFTH FLOOR BUILDINGD NO 28 SHUANGFU ROAD HAINING ECONOMIC DEVELOPMENT ZONE HAINING JIAXING CITY ZHEJIANG PROVINCE 314400

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Yueming Jiaxing, CN 7 21
Chen, Yun Jiaxing, CN 224 841
Tang, Jincai Jiaxing, CN 4 4
Wang, Lanhai Jiaxing, CN 4 4
Zhong, Yaling Jiaxing, CN 6 10
Zhong, Yuming Jiaxing, CN 8 27

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 3, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 3, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 3, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00