Method for cleaning vaporizer and vaporization apparatus

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United States of America Patent

PATENT NO 11772006
SERIAL NO

17445973

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Abstract

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A method for cleaning a vaporizer that vaporizes, at normal temperature and pressure, a source material in a liquid state, and supplies the vaporized source material to a reactor through a supply pipe, includes a cleaning step of passing the source material to the vaporizer while maintaining the source material in a liquid state to clean the vaporizer.

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Patent Owner(s)

Patent OwnerAddress
FURUKAWA ELECTRIC CO LTDTOKYO JAPAN TOKYO METROPOLIS

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asai, Toshiyuki Tokyo, JP 8 52
Kawasaki, Mitsuhiro Tokyo, JP 14 78
Otani, Hiroki Tokyo, JP 2 3

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