Wafer transport assembly with integrated buffers

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United States of America Patent

PATENT NO 11764086
APP PUB NO 20220344183A1
SERIAL NO

17860736

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Abstract

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A substrate processing system configured to process substrates includes a substrate transport assembly that encloses a controlled environment defined within a continuous transport volume and at least two process modules coupled to the substrate transport assembly. The substrate transport assembly is configured to transport substrates to and from the at least two process modules through the continuous transport volume. At least two gas boxes are configured to deliver gas mixtures to the at least two process modules. An exhaust duct configured to selectively evacuate the at least two process modules through the at least two gas boxes. Surfaces of the at least two gas boxes include perforations configured to allow gases to flow from the at least two gas boxes into the exhaust duct.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PKWY FREMONT CALIFORNIA 94538 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Daugherty, John Fremont, US 73 1138
Gould, Richard H Bedford, US 37 785
Kellogg, Michael C Oakland, US 47 1964
Kunkel, Klay Sunol, US 6 15
Pena, Christopher J Hayward, US 9 34
Trussell, David Fremont, US 18 181

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