Method of making semiconductor device and semiconductor device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 19, 2023
Grant Date -
Nov 17, 2022
app pub date -
Jul 28, 2022
filing date -
May 26, 2017
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of making a semiconductor structure includes forming a plurality of gate electrodes over a plurality of active regions. The method further includes increasing a width of a portion of each of the plurality of gate electrodes between adjacent active regions of the plurality of active regions, wherein increasing the width of the portion of each of the plurality of gate electrodes comprises increasing the width of less than an entirety of each of the plurality of gate electrodes between the adjacent active regions. The method further includes removing a central region of each of the plurality of gate electrodes, wherein the central region has the increased width, and removing the central region comprises removing less than an entirety of the portion of each of the plurality of gate electrodes.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2022 Application Filing Year
- H01L Class
- 27731 Applications Filed
- 8200 Patents Issued To-Date
- 29.57 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 2 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 19, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 19, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 19, 2035 |
