Probe card integrated with a hall sensor

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United States of America Patent

PATENT NO 11761983
APP PUB NO 20230083401A1
SERIAL NO

17472722

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Abstract

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The present disclosure provides a wafer probe card including: a non-magnetic printed circuit board (PCB) having a first side and a second side opposite the first side, the first side configured to face a magnet; a plurality of connection structures provided on the first side of the non-magnetic PCB; and a Hall sensor unit fixedly provided on the first side of the non-magnetic PCB, the Hall sensor electrically connected to at least one of the plurality of connection structures.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES SINGAPORE PTE LTD60 WOODLANDS INDUSTRIAL PARK D STREET 2 SINGAPORE 738406

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Seah, Meng Yew Singapore, SG 2 0
Sun, Yongshun Singapore, SG 23 15
Teo, Guoquan Singapore, SG 1 0
Toh, Eng Huat Singapore, SG 256 1730

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