Film structure and method for manufacturing the same

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United States of America Patent

PATENT NO 11758817
APP PUB NO 20190123257A1
SERIAL NO

16096077

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Abstract

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A film structure (10) includes a substrate (11), a piezoelectric film (14) formed on the substrate (11) and containing first composite oxide represented by a composition formula Pb(Zr1-xTix)O3, and a piezoelectric film (15) formed on the piezoelectric film (14) and containing second composite oxide represented by a composition formula Pb(Zr1-yTiy)O3. In the composition formulae, x satisfies 0.1014) has tensile stress, and the piezoelectric film (15) has compressive stress.

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Patent Owner(s)

Patent OwnerAddress
KRYSTAL INC2-1-17 ASUTOPIA UBE-SHI YAMAGUCHI 755-0152

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kijima, Takeshi Yamaguchi, JP 167 1581

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