Molybdenum containing targets

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United States of America Patent

PATENT NO 11753702
APP PUB NO 20210079512A1
SERIAL NO

17038325

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Abstract

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The invention is directed at sputter targets including 50 atomic % or more molybdenum, a second metal element of niobium or vanadium, and a third metal element selected from the group consisting of titanium, chromium, niobium, vanadium, and tantalum, wherein the third metal element is different from the second metal element, and deposited films prepared by the sputter targets. In a preferred aspect of the invention, the sputter target includes a phase that is rich in molybdenum, a phase that is rich in the second metal element, and a phase that is rich in the third metal element.

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Patent Owner(s)

  • H.C. STARCK SOLUTIONS EUCLID, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gaydos, Mark E Nashua, US 20 149
Hogan, Patrick Alan Somerville, US 10 55
Rozak, Gary Alan Akron, US 20 102
Sun, Shuwei Framingham, US 27 228

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