Method of manufacturing glass with hollow nanopillars and glass with hollow nanopillars manufactured thereby
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United States of America Patent
Stats
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Sep 12, 2023
Grant Date -
Jun 3, 2021
app pub date -
Oct 23, 2020
filing date -
Nov 29, 2019
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to: a method of manufacturing glass with hollow nanopillars, which includes a silicon oxide layer forming step in which a silicon oxide layer made of silicon oxide is formed on one side of a glass substrate, a first etching step in which the silicon oxide layer is etched and a plurality of silicon oxide clusters are formed on the glass substrate, and a second etching step in which the glass substrate, on which the silicon oxide clusters are formed, is etched and hollow nanopillars are formed; and glass with hollow nanopillars manufactured thereby.
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International Classification(s)
- 2020 Application Filing Year
- C03C Class
- 883 Applications Filed
- 456 Patents Issued To-Date
- 51.65 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- C03C Class
- 0 % this patent is cited more than
- 2 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 12, 2027 |
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