MEMS device with electrodes and a dielectric

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United States of America Patent

PATENT NO 11753295
APP PUB NO 20230166966A1
SERIAL NO

18079519

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Abstract

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A MEMS device can include a solid dielectric including a plurality of apertures, the solid dielectric having a first side and a second side. The MEMS device can include a first plurality of electrodes extending completely through a first subset of the plurality of apertures, a second plurality of electrodes extending partially through a second subset of the plurality of apertures, a third plurality of electrodes extending partially into a third subset of the plurality of apertures. The MEMS device can include a first diaphragm coupled to the first plurality and to the third plurality of electrodes, the first diaphragm facing the first side of the solid dielectric. The MEMS device can include a second diaphragm coupled to the first plurality and to the second plurality of electrodes the second diaphragm facing the second side of the solid dielectric.

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Patent Owner(s)

Patent OwnerAddress
KNOWLES ELECTRONICS LLC1151 MAPLEWOOD DRIVE ITASCA IL 60143

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Loeppert, Peter V Durand, US 58 1769
Pedersen, Michael Long Grove, US 85 1006

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