Electrode for a discharge chamber

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United States of America Patent

PATENT NO 11749520
SERIAL NO

17411155

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Abstract

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A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ramin, Leyla San Diego, US 4 2

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