Compact line scan mems time of flight system with actuated lens
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United States of America Patent
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Sep 5, 2023
Grant Date -
N/A
app pub date -
Dec 16, 2020
filing date -
Dec 16, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
An optical module includes an optical detector, laser emitter, and first and second support structures, each carried by a substrate. An optical layer includes first and second fixed portions carried by the support structures, a movable portion affixed between the fixed portions by a spring structure, and a lens system carried by the movable portion, the lens system including an objective lens and a beam shaping lens. The optical layer includes a comb drive with a first comb structure extending from the first fixed portion to interdigitate with a second comb structure extending from the movable portion, a third comb structure extending from the second fixed portion to interdigitate with a fourth comb structure extending from the movable portion, and actuation circuitry applying voltages to the comb structures to cause the movable portion of the optical layer to oscillate back and forth between the fixed portions.
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