MEMS phase shifter including a substrate with a coplanar waveguide signal structure formed thereon and electrically insulated from a metal film bridge
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United States of America Patent
Stats
-
Aug 29, 2023
Grant Date -
Sep 22, 2022
app pub date -
Oct 29, 2021
filing date -
Mar 16, 2021
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A MEMS phase shifter, including: a substrate; a coplanar waveguide signal structure on the substrate; two coplanar waveguide ground wires respectively at two sides of the coplanar waveguide signal structure; insulating isolation layers respectively on the two coplanar waveguide ground wires; and a metal film bridge across and over the coplanar waveguide signal structure and forming a gap with the coplanar waveguide signal structure, both ends of the metal film bridge respectively attached to the insulating isolation layers on the two coplanar waveguide ground wires, wherein an insulating dielectric layer is provided on the coplanar waveguide signal structure, and the insulating dielectric layer comprises at least one concave part, which is concave in the direction towards the substrate, on the surface facing the metal film bridge.
First Claim
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International Classification(s)
- 2021 Application Filing Year
- H01P Class
- 546 Applications Filed
- 322 Patents Issued To-Date
- 58.98 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01P Class
- 0 % this patent is cited more than
- 2 Age
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