Measuring temperature-modulated properties of a test sample

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United States of America Patent

PATENT NO 11740279
APP PUB NO 20210333316A1
SERIAL NO

17235902

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Abstract

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A physical property of a test sample with a conductive or semi-conductive material (line/area/volume) is obtained. Periodic Joule heating is induced within the test sample by passing an AC current across a first pair of probe terminals electrically connected to the test sample, measuring the voltage drop across a second pair of probe terminals electrically connected to the test sample at one and three times the fundamental excitation frequency of the current-conducting terminals, and calculating the temperature-modulated property/properties of the test sample as a function of the potential drop measurement(s). This includes: a) determining a value proportional to the TCR of the test sample, b) a geometric parameter of the test sample (affected by coupling of its TCR to heat transport to/from the test sample), or c) the true resistivity of the test sample at the ambient experimental temperature by subtracting measurable and accountable TCR offset(s).

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guralnik, Benny Valby, DK 2 1
Hansen, Ole Horsholm, DK 42 530
Henrichsen, Henrik Hartmann Copenhagen, DK 3 4
Petersen, Dirch Hjorth Herlev, DK 5 11

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