Lattice coat surface enhancement for chamber components
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United States of America Patent
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Aug 29, 2023
Grant Date -
May 6, 2021
app pub date -
Nov 4, 2019
filing date -
Nov 4, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Disclosed are embodiments for an engineered feature formed as a part of or on a chamber component. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has an outer surface. An engineered complex surface is formed on the outer surface. The engineered complex surface has a first lattice framework formed from a plurality of first interconnected laths and a plurality of first openings are bounded by three or more laths of the plurality of laths.
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- F16M:FRAMES, CASINGS, OR BEDS, OF ENGINES OR OTHER MACH....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- F27B:FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPE....
- B01L:CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENE....
- F27D:DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, ....
- E04B:GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTIT....
- B22F:WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES F....
- B29L:INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RE....
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