Bath systems and methods thereof
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United States of America Patent
Stats
-
Aug 29, 2023
Grant Date -
Dec 8, 2022
app pub date -
Jun 7, 2021
filing date -
Jun 7, 2021
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution.
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International Classification(s)
- 2021 Application Filing Year
- B05C Class
- 408 Applications Filed
- 212 Patents Issued To-Date
- 51.97 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B05C Class
- 0 % this patent is cited more than
- 2 Age
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