Automatic locating of target marks
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 22, 2023
Grant Date -
Nov 12, 2020
app pub date -
May 6, 2020
filing date -
May 6, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A target reflector search device. This device comprises an emitting unit for emitting an emission fan, a motorized device for moving the emission fan over a spatial region, and a receiving unit for reflected portions of the emission fan within a fan-shaped acquisition region, and a locating unit for determining a location of the reflection. An optoelectronic detector of the receiving unit is formed as a position-resolving optoelectronic detector having a linear arrangement of a plurality of pixels, each formed as an SPAD array, and the receiving unit comprises an optical system having an imaging fixed-focus optical unit, wherein the optical system and the optoelectronic detector are arranged and configured in such a way that portions of the optical radiation reflected from a point in the acquisition region are expanded on the sensitivity surface of the optoelectronic detector in such a way that blurry imaging takes place.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2020 Application Filing Year
- H01L Class
- 29783 Applications Filed
- 21134 Patents Issued To-Date
- 70.96 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- H01L Class
- 79.89 % this patent is cited more than
- 2 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Feb 22, 2027 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 22, 2031 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 22, 2035 |
