Neutral layer composition
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United States of America Patent
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Aug 22, 2023
Grant Date -
Dec 17, 2020
app pub date -
Jul 16, 2018
filing date -
Jul 14, 2017
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Abstract
A neutral layer composition and a neutral layer formed from the same are disclosed herein. In some embodiments, a neutral layer composition includes a random copolymer having a unit represented by Formula 1, and a unit containing an aromatic structure having one or more halogen atoms, wherein the molar amount of the unit represented by Formula 1 is present in a range of 9 mol % to 32 mol %, based on the total molar amount of the copolymer. The neutral layer can effectively control orientation characteristics of various block copolymers deposited thereon.
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