Electro-hydraulic micro-displacement platform, a micro-displacement system, a precision compensation system, and its method

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United States of America Patent

PATENT NO 11731225
SERIAL NO

18098733

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Abstract

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An electro-hydraulic micro-displacement platform, a micro-displacement system, a precision compensation system, and its method, comprises an x-direction guide rail and a y-direction guide rail slidingly connected with a cross slider respectively. The x-direction guide rail is fixed on the floor of the frame, and a z-direction fixed platform is fixed on the y-direction guide rail. The periphery of the z-direction fixed platform is connected with the side plate of the frame through the x-direction micro-displacement actuator and the y-direction micro-displacement actuator, the z-direction fixed platform is connected with the z-direction floating platform through the first z-direction micro-displacement actuator, the z-direction floating platform is connected with the z-direction auxiliary fixed platform through the second z-direction micro-displacement actuator, and the z-direction fixed platform is fixedly connected with the z-direction auxiliary fixed platform. The z-direction floating platform is connected to the workpiece mounting plate.

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Patent Owner(s)

Patent OwnerAddress
SHANDONG UNIVERSITYNO 27 SHAN DANA ROAD JI'NAN SHANDONG PROVINCE SHANDONG JINAN CITY SHANDONG PROVINCE 250000

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guo, Kai Jinan, CN 112 449
He, Wei Jinan, CN 573 3647
Sun, Jie Jinan, CN 222 1935
Sun, Mingjian Jinan, CN 2 1

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