Ion current droop compensation
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United States of America Patent
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Aug 15, 2023
Grant Date -
Oct 13, 2022
app pub date -
Jun 27, 2022
filing date -
Jul 9, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 mΩ1.25Ω; and a snubber capacitor having a capacitance of about 2 μF-35 μF.
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