Electromagnetic shielding during wafer stage testing

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United States of America Patent

PATENT NO 11726112
APP PUB NO 20210080487A1
SERIAL NO

16572369

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Abstract

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A circuit probe includes a shielding probe having a base and a conductive probe ring on the base. A shielding cage is attached to the conductive probe ring and has an interior. The shielding cage is configured to be positioned to contain in the interior of the shielding cage at least one integrated circuit formed on a wafer, and to provide electromagnetic shielding of the at least one integrated circuit during testing of the at least one integrated circuit.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lai, Chi-Chang Taichung, TW 25 51
Peng, Ching-Nen Hsinchu, TW 50 416
Wang, Hsien-Tang Hsinchu, TW 3 29
Wang, Mill-Jer Hsinchu, TW 85 602

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