Preventing deposition on pedestal in semiconductor substrate processing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11725285
APP PUB NO 20210230749A1
SERIAL NO

17262855

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Importance

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Abstract

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A heat shield structure for a substrate support in a substrate processing system includes an outer shield configured to surround a stem of the substrate support. The outer shield is further configured to define an inner volume between the outer shield and an upper portion of the stem and a lower surface of the substrate support and a vertical channel between the outer shield and a lower portion of the stem of the substrate support. The outer shield includes a cylindrical portion, a first lateral portion extending radially outward from the cylindrical portion, an angled portion extending radially outward and upward from the first lateral portion, and a second lateral portion extending radially outward from the angled portion.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gulabal, Vinayakaraddy Yadgir, IN 10 3
Lind, Gary B Penn Valley, US 12 334
Rumer, Michael Santa Clara, US 6 46
Satyadevan, Manjunath Bangalore, IN 2 0
Vellanki, Ravi San Jose, US 13 72

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