System and method for fluid preparation
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United States of America Patent
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Aug 15, 2023
Grant Date -
Jun 25, 2020
app pub date -
Oct 30, 2019
filing date -
Dec 20, 2018
priority date (Note) -
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Abstract
A fluid preparation system includes a tank, a chemical supply line, a mixer, and a deionized (DI) water supply line. The tank contains a first chemical solution. The chemical supply line is coupled to the tank and configured to supply the first chemical solution. The mixer is coupled to the tank. The DI water supply line is coupled to the mixer and configured to supply DI water. The first chemicals solution and the DI water are mixed at the mixer to generate a second chemical solution.
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