Imprint apparatus, imprint method, and method of manufacturing article

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11718014
APP PUB NO 20200316843A1
SERIAL NO

16837914

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An imprint apparatus that forms a curable composition on a substrate using a mold includes a first measurement unit configured to measure a height distribution of the substrate at a contact position where the mold and the curable composition are brought into contact with each other. The first measurement unit measures a height of the substrate by bringing a probe into contact with a surface of the substrate, the probe having a contact surface area smaller than a contact surface area of the mold.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHAJAPAN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hattori, Tadashi Utsunomiya, JP 223 4158

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Feb 8, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 8, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 8, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00