AFM imaging with creep correction

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United States of America Patent

PATENT NO 11714104
APP PUB NO 20220381803A1
SERIAL NO

17329620

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Abstract

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An atomic force microscope (AFM) and method of operating the same includes a separate Z height sensor to measure, simultaneously with AFM system control, probe sample distance, pixel-by-pixel during AFM data acquisition. By mapping the AFM data to low resolution data of the Z height data, a high resolution final data image corrected for creep is generated in real time.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fonoberov, Vladimir Santa Barbara, US 7 8
Hand, Sean Santa Barbara, US 5 5
Osborne, Jason Lompoc, US 9 30
Young, James Santa Barbara, US 131 2556

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