Atomic force microscope using artificial intelligence object recognition technology and operation method thereof
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United States of America Patent
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Jul 25, 2023
Grant Date -
Nov 24, 2022
app pub date -
May 11, 2021
filing date -
Jul 14, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
An atomic force microscope includes a sample stage on which a sample is placed, a cantilever including a probe tip, a laser radiating a laser beam to the cantilever, a photodetector receiving a laser beam reflected from the cantilever, a first camera photographing the sample and the cantilever, a second camera photographing the cantilever and the spot of the laser beam, and a processor electrically connected to the first and second cameras and the photodetector to process data acquired by the first and second cameras and the photodetector. An operation method of the atomic force microscope includes detecting the positions of the cantilever and the sample using the first camera, adjusting the position of the sample, detecting the positions of the laser and the cantilever using the second camera, aligning the laser, detecting the position of the laser beam using the photodetector, and aligning the position of the photodetector.
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