High efficiency and high sensitivity particle capture type terahertz sensing system
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United States of America Patent
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Jul 18, 2023
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N/A
app pub date -
Dec 31, 2020
filing date -
Jun 12, 2020
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Abstract
Provided is a high efficiency and high sensitivity particle capture type terahertz sensing system. The particle capture type terahertz sensing system includes a sensing substrate to capture particles, and a terahertz sensor to emit terahertz electromagnetic waves to the sensing substrate to sense the particles, wherein the sensing substrate includes a base substrate and a particle capture structure layer formed on the base substrate, the particle capture structure layer includes a plurality of slits for focusing the terahertz electromagnetic waves, the particle capture structure layer captures the particles in the plurality of slits using dielectrophoresis, and an area in which the terahertz electromagnetic waves converge to the plurality of slits matches an area in which the particles are captured in the plurality of slits through the dielectrophoresis.
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