Continuous spectra transmission pyrometry
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United States of America Patent
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Jul 18, 2023
Grant Date -
Feb 25, 2021
app pub date -
Oct 30, 2020
filing date -
May 26, 2017
priority date (Note) -
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Abstract
An apparatus for processing substrates includes a continuum radiation source, a source manifold optically coupled to the continuum radiation source and comprising: a plurality of beam guides, each having a first end that optically couples the beam guide to the continuum radiation source; and a second end. The apparatus also includes a detector manifold to detect radiation originating from the source manifold and transmitted through a processing area, and one or more transmission pyrometers configured to analyze the source radiation and the transmitted radiation to determine an inferred temperature proximate the processing area.
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