Deposition on two sides of a web
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United States of America Patent
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Jul 4, 2023
Grant Date -
Nov 29, 2018
app pub date -
Jul 17, 2018
filing date -
Dec 14, 2009
priority date (Note) -
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status (Latency Note)
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Abstract
Apparatuses and methods for depositing materials on both sides of a web while it passes a substantially vertical direction are provided. In particular embodiments, a web does not contact any hardware components during the deposition. A web may be supported before and after the deposition chamber but not inside the deposition chamber. At such support points, the web may be exposed to different conditions (e.g., temperature) than during the deposition. Also provided are substrates having materials deposited on both sides that may be fabricated by the methods and apparatuses.
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