Probe for testing an electrical property of a test sample

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United States of America Patent

PATENT NO 11693028
APP PUB NO 20200278380A1
SERIAL NO

16764038

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Abstract

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A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe comprises a probe body, a first cantilever extending from the probe body, and a first thermal detector extending from the probe body. The thermal detector is used to position the cantilever with respect to a test sample.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Østerberg, Frederik Westergaard Hellerup, DK 2 4
Cagliani, Alberto Copenhagen, DK 4 9
Hansen, Ole Hørsholm, DK 42 530
Henrichsen, Henrik Hartmann Copenhagen, DK 3 4
Nielsen, Peter Folmer Harlev, DK 9 43
Petersen, Dirch Hjorth Herlev, DK 5 11

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