Metal-oxide semiconductor evaporation source equipped with variable temperature control module

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United States of America Patent

PATENT NO 11692260
APP PUB NO 20210285088A1
SERIAL NO

17105743

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Abstract

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A metal-oxide electron-beam evaporation source including a variable temperature control device according to the present invention includes: a crucible configured to store a deposition material which is formed of a metal oxide and over which an electron beam is directly scanned; N heating units provided in an outer portion of the crucible, dividing the crucible into N regions, and provided for N regions, respectively; and a control unit configured to control the N heating units so that a temperature of an upper region of the crucible is maintained to be higher than that of a lower region of the crucible to reduce a temperature difference between a region over which the electron beam is scanned and a region over which the electron beam is not scanned.

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Patent Owner(s)

Patent OwnerAddress
T O S CO LTD(NAESAMMI-DONG) 129-20 GYEONGGI-DAERO 632BEON-GIL OSAN-SI GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Bum Ho Goyang-si, KR 9 12
Jo, Yeong Geun Osan-si, KR 3 2
Kim, Yong Sik Suwon-si, KR 64 448
Lee, Seung Soo Gyeonggi-do, KR 35 54

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