Electron emitter and method of fabricating same

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United States of America Patent

PATENT NO 11688579
SERIAL NO

17549854

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Abstract

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Electron emitters and methods of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.

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ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Zhong-wei San Jose, US 53 745
Dou, Juying San Jose, US 21 169
Fan, Zheng Beijing, CN 12 16
Kuo, Tzu-Yi Hsinchu, TW 8 3

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