Textured processing chamber components and methods of manufacturing same
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United States of America Patent
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Jun 27, 2023
Grant Date -
Jun 13, 2019
app pub date -
Dec 8, 2017
filing date -
Dec 8, 2017
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Abstract
Processing chamber components and methods of manufacture of same are provided herein. In some embodiments, a component part body includes a component part body having a base plane and at least one textured surface region, wherein the at least one textured surface region comprises a plurality of independent surface features having a first side having at least a 45 degree angle with respect to the base plane. In at least some embodiments, the textured surface includes a plurality of independent surface features which are pore free.
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