Prevention of dripping of material for material injection
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United States of America Patent
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Jun 27, 2023
Grant Date -
N/A
app pub date -
Mar 9, 2022
filing date -
May 13, 2019
priority date (Note) -
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Abstract
An injection apparatus for injection material is disclosed. The injection apparatus includes a tank for storing material. The injection apparatus further includes a head body that has a surface for contacting a substrate and an opening part opened at the surface for discharging the material in fluid-communication with the tank. The injection apparatus further includes a member connected to the opening part, in which the member allows gas to flow into and flow out from the opening part.
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