Scanning probe microscope with a sample holder fed with electromagnetic wave signals
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United States of America Patent
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Jun 13, 2023
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N/A
app pub date -
Dec 13, 2019
filing date -
Dec 14, 2018
priority date (Note) -
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Abstract
A scanning probe microscope including a holder having at least one electric port, wherein the holder is configured to support a sample to be imaged. The scanning probe microscope further includes a probe and an actuator configured to move at least one of the holder and the probe up to three directions. The scanning probe microscope further includes a reflectometer configured to measure reflection and/or transmission coefficients at each of the at least one electric ports of the holder by feeding each of the at least one electric ports of the holder with electromagnetic wave signals.
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