Imprint apparatus and article manufacturing method
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United States of America Patent
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Jun 13, 2023
Grant Date -
Dec 3, 2020
app pub date -
May 21, 2020
filing date -
May 28, 2019
priority date (Note) -
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Abstract
An imprint apparatus brings an imprint material on a substrate including a first mark into contact with a mold including a second mark and cures the imprint material, thereby forming a cured product of the imprint material on the substrate. The apparatus includes a plurality of detectors used for alignment detection, and a controller configured to obtain a plurality of pieces of relative position information by detecting a relative position between the first mark and the second mark a plurality of times using the plurality of detectors in a state in which the imprint material is cured and a positional relationship between the substrate and the mold is maintained, and to calibrate, based on the plurality of pieces of relative position information, a plurality of detection processing operations each performed using each of the plurality of detectors.
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