High speed atomic force profilometry of large areas
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United States of America Patent
Stats
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Jun 6, 2023
Grant Date -
Nov 4, 2021
app pub date -
Apr 6, 2021
filing date -
Aug 10, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus and method of operating an atomic force profiler (AFP), such as an AFM, using a feedforward control signal in subsequent scan lines of a large area sample to achieve large throughput advantages in, for example, automated applications.
First Claim
Other Claims data not available
Family
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| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| KR | A | KR20210042358 | Aug 12, 2019 |
| EP | A1 | EP3833988 | Aug 12, 2019 |
| US | B2 | US10969406 | Aug 12, 2019 |
| WO | A1 | WO2020033958 | Aug 12, 2019 |
| TW | B | TWI847994 | Aug 12, 2019 |
International Classification(s)
- 2021 Application Filing Year
- G01Q Class
- 99 Applications Filed
- 63 Patents Issued To-Date
- 63.64 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 2 Age
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