Fluid supply apparatus and substrate processing apparatus including the same
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United States of America Patent
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-
Apr 11, 2023
Grant Date -
Dec 15, 2022
app pub date -
Jan 25, 2022
filing date -
Jun 14, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A fluid supply apparatus includes a container supply holder configured to supply a container to a cap separator using a loading box, the container including a detachable nozzle cap, and configured to store a process fluid, a cap separator configured to receive the container from the loading box and separate the nozzle cap from a container body of the container using a cap clamper and a rotation actuator, the cap clamper configured to clamp and hold the nozzle cap, and the rotation actuator configured to rotate the container body, a fluid supplier configured to supply the process fluid contained in the container body through a fluid supply line, and a controller configured to control the container supply holder, the cap separator, and the fluid supplier.
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