Capacitive element and plasma processing device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11615922
APP PUB NO 20210050156A1
SERIAL NO

16964603

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Abstract

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A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an inlet port for introducing a liquid serving as a dielectric, has an outlet port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.

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Patent Owner(s)

Patent OwnerAddress
NISSIN ELECTRIC CO LTDKYOTO-SHI KYOTO 615

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Yasunori Kyoto, JP 42 399
Li, Dongwei Kyoto, JP 21 50

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