AFM imaging with real time drift correction
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United States of America Patent
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Mar 14, 2023
Grant Date -
Jan 12, 2023
app pub date -
Jul 8, 2021
filing date -
Jul 8, 2021
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Abstract
A system and method of operating an atomic force microscope (AFM) that includes providing relative scanning motion between a probe of the AFM and a sample in a slow scan direction of a data scan to generate a reference image (plane) of a region of interest. Then, relative scanning motion between the probe and the sample is provided in a fast scan direction of a final data scan to generate a data image. By mapping the data image against the reference image in real-time during the supplying step, the preferred embodiments generate a final drift corrected data image without post-image acquisition processing.
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