Thin film laminate, thin film device and multilayer substrate
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United States of America Patent
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Feb 28, 2023
Grant Date -
Jul 2, 2020
app pub date -
Dec 18, 2019
filing date -
Dec 28, 2018
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Abstract
A thin film laminate comprises a metal layer consisting of a metal, and a thin film laminated on the surface of the metal layer, wherein a first direction is defined as one direction parallel to the surface of the metal layer, and a second direction is defined as one direction parallel to the surface of the metal layer and crossing the first direction; and the metal layer contains a plurality of first metal grains consisting of the metal and extending in the first direction on the surface of the metal layer, and a plurality of second metal grains consisting of the metal and extending in the second direction on the surface of the metal layer.
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