Dry pump and exhaust gas treatment method
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United States of America Patent
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Feb 28, 2023
Grant Date -
Jul 20, 2017
app pub date -
Jul 6, 2015
filing date -
Jul 31, 2014
priority date (Note) -
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Abstract
An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.
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