Substrate carrier deterioration detection and repair
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United States of America Patent
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Feb 21, 2023
Grant Date -
N/A
app pub date -
Dec 7, 2020
filing date -
Oct 26, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.
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