Processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11581198
APP PUB NO 20200227287A1
SERIAL NO

16736241

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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There is provided a processing apparatus including: a processing part including a plurality of process modules connected to each other in a first room, and a loader module provided in the first room and accommodating a carrier which receives a substrate processed by each of the plurality of process modules; and a plurality of pump units corresponding to the plurality of process modules, respectively, and arranged in a second room adjacent to the first room, wherein an installation area of the plurality of pump units is equal to or smaller than that of the processing part.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kadobe, Masato Oshu, JP 12 421

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