Systems and methods for etching a substrate
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 14, 2023
Grant Date -
Jul 2, 2020
app pub date -
Dec 26, 2019
filing date -
Dec 26, 2018
priority date (Note) -
In Force
status (Latency Note)
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Importance

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Abstract
A method of processing a workpiece may include forming a first layer on a first side of a base layer. The base layer may be part of a substrate including a plurality of layers. The method may also include forming a second layer on the first layer. A material of the second layer may include metal. The method may also include forming an opening in the second layer, forming an opening in the first layer by etching, and removing the second layer. The method may include dry etching of the first layer.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
HERMES MICROVISION INC | 7F NO 18 PUDING RD EAST DIST HSINCHU CITY 300 |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Fang, Jie | San Jose, US | 53 | 109 |
# of filed Patents : 53 Total Citations : 109 | |||
Wang, Yixiang | Fremont, US | 43 | 57 |
# of filed Patents : 43 Total Citations : 57 | |||
Yang, Jinmei | Beijing, CN | 5 | 7 |
# of filed Patents : 5 Total Citations : 7 | |||
Zhang, Haojie | Beijing, CN | 16 | 15 |
# of filed Patents : 16 Total Citations : 15 | |||
Zhang, Qirong | Beijing, CN | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Zhu, Fenghui | Beijing, CN | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 |
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- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 2 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Aug 14, 2026 |
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Aug 14, 2030 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 14, 2034 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 3.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text

Legal Events
Date | Code | Event | Description |
---|---|---|---|
Oct 26, 2015 | STCH | INFORMATION ON STATUS: PATENT DISCONTINUATION | free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
Sep 25, 2015 | FP | LAPSED DUE TO FAILURE TO PAY MAINTENANCE FEE | Effective Date: Sep 25, 2015 |
Sep 25, 2015 | LAPS | LAPSE FOR FAILURE TO PAY MAINTENANCE FEES | |
May 08, 2015 | REMI | MAINTENANCE FEE REMINDER MAILED | |
Feb 24, 2011 | FPAY | FEE PAYMENT | year of fee payment: 4 |
Sep 25, 2007 | I | Issuance | |
Sep 08, 2005 | P | Published | |
Dec 16, 2004 | AS | ASSIGNMENT | free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KIRIYAMA, HIROMITSU;YAMAKAWA, KOICHI;REEL/FRAME:016140/0408 Owner name: JAPAN ATOMIC ENERGY RESEARCH INSTITUTE, JAPAN Effective Date: Dec 16, 2004 |
Aug 27, 2004 | F | Filing | |
Mar 04, 2004 | PD | Priority Date |

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