Debris removal in high aspect structures

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11577286
APP PUB NO 20210308724A1
SERIAL NO

17348217

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Abstract

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A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arruza, Bernabe Boca Raton, US 5 11
Brinkley, David Baltimore, US 19 78
LeClaire, Jeffrey E Boca Raton, US 24 120
Robinson, Tod Evan Boynton Beach, US 13 93
Roessler, Kenneth Gilbert Boca Raton, US 22 244

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