Imprint apparatus, imprint method, and method of manufacturing article
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United States of America Patent
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Jan 31, 2023
Grant Date -
N/A
app pub date -
Oct 13, 2020
filing date -
Oct 23, 2019
priority date (Note) -
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Abstract
The present invention provides an imprint apparatus including a holding unit configured to hold a material, a measurement unit configured to measure a position of the material held by the holding unit, a detection unit configured to detect dechucking of the material in the holding unit, and a control unit configured to control continuation processing for continuing an imprint process if the detection unit has detected the dechucking, wherein the control unit performs, as the continuation processing, processing of causing the holding unit to hold the dechucked material again without unloading the material from the imprint apparatus, and processing of measuring, by the measurement unit, a position of the material held again by the holding unit before the imprint process to use the position for alignment in the imprint process.
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