Methods, systems, and apparatus for optically monitoring individual lamps
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United States of America Patent
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Jan 24, 2023
Grant Date -
Sep 22, 2022
app pub date -
Jan 24, 2022
filing date -
Mar 19, 2021
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Abstract
Methods, systems, and apparatus provide for optically monitoring individual lamps of substrate processing chambers. In one aspect, the individual lamps are monitored to determine if one or more lamps are in need of replacement. A method includes using one or more camera coupled to a borescope to capture a plurality of images of one or more lamps in a substrate processing chamber. The plurality of images is analyzed to identify a change of mean light pixel intensity in an image reference region associated with each lamp. The method includes generating an alert based on the detection of the mean light pixel intensity change.
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