Electrostatic chuck

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11557465
APP PUB NO 20210074521A1
SERIAL NO

17009265

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

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Patent Owner(s)

Patent OwnerAddress
TOTO LTDFUKUOKA PREFECTURE FUKUOKA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Momiyama, Yutaka Kitakyushu, JP 50 40
Sasaki, Hitoshi Kitakyushu, JP 151 892
Shigezumi, Tsukasa Kitakyushu, JP 32 77
Suzuki, Minoru Kitakyushu, JP 316 4215

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